Microfabrication of tungsten, molybdenum and tungsten carbide rods by Lser-Assisted CVD

Bjorklund, Kajsa

Microfabrication of tungsten, molybdenum and tungsten carbide rods by Lser-Assisted CVD - Sweden: Acta Universitatis Upsaliensis Uppsala, 2001 - 44p. ill. 25cm.

91-554-5197-7


Tungsten

PAM QD181.W1B56