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Mechanical considerations in the design of high-pricision surface micromachined devices

By:

Greek, Staffan

Contributor(s):

ill

Material type: Text

Text

TextPublication details: Uppsala; Acta Universitatis Upsaliensis; 1998Description: 24cmISBN:

9155443435

Subject(s):

Science and technology

LOC classification:

PAM QA76.76.G83 No.409

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