Powell, Ronald A <br/><br/>
Dry etching for microelectronics 

 - New York  : North- Holland Physics Publishing,  1984 
 - xi,299p.  : ill.  ; 24cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>0 44486905 0 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors-Etching, <br/>Plasma etching
<br/><br/><label>LC Class. No.: </label>PHYSTK7871.85.D79