TY  - BOOK
AU  - Powell,Ronald A
TI  - Dry etching for microelectronics
SN  - 0 44486905 0
AV  - PHYSTK7871.85.D79 
PY  - 1984///
CY  - New York
PB  - : North- Holland Physics Publishing
KW  - Semiconductors-Etching,
KW  - Plasma etching
N1  - Includes bibliographical references and index
ER  -