SZE, S. M <br/><br/>
VLSI Technology 

 - 2nd ed.- 
 - New York:  McGraw-Hill Book Company,  1988 
 - 676p.:  ill.;  23cm. 
<br/><br/><label>ISBN: </label>0-07-100347-9 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Technology<br/>VLSI process intergration<br/>Analytical techniques.
<br/><br/><label>LC Class. No.: </label>TK7874.V566