TY  - BOOK
AU  - SZE,S.M
TI  - VLSI Technology
SN  - 0-07-100347-9
AV  - TK7874.V566 
PY  - 1988///
CY  - New York
PB  - McGraw-Hill Book Company
KW  - Technology
KW  - VLSI process intergration
KW  - Analytical techniques
ER  -