Ljungberg, Karin <br/><br/>
Phenomenology of Silicon water bonding 

 - Uppsala  Acta Universitatis Upsaliensis  1995 
 - 59p.  25cm. 
<br/><br/> Includes references 
<br/><br/><label>ISBN: </label>9155436331 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Science and technology
<br/><br/><label>LC Class. No.: </label>PAM QA76.76.L58