TY  - BOOK
AU  - Greek, Staffan
AU  - ill.
TI  - Mechanical considerations in the design of high-pricision surface micromachined devices
SN  - 9155443435
AV  - PAM QA76.76.G83 No.409 
CY  - Uppsala
KW  - Science and technology
N1  - Includes bibliographical references
ER  -