| 000 | 00530nam a2200181 4500 | ||
|---|---|---|---|
| 001 | 000000320483 | ||
| 020 | _a0 44486905 0 | ||
| 040 | _cUDSM | ||
| 050 | _aPHYSTK7871.85.D79 | ||
| 100 | 1 |
_aPowell, Ronald A _eAuthor |
|
| 245 | 1 | _aDry etching for microelectronics | |
| 260 |
_aNew York _b: North- Holland Physics Publishing, _c1984 |
||
| 300 |
_axi,299p. _b: ill. _c; 24cm. |
||
| 504 | _aIncludes bibliographical references and index | ||
| 650 | _aSemiconductors-Etching, | ||
| 650 | _aPlasma etching | ||
| 942 |
_2lcc _cBK _n0 |
||
| 999 |
_c131757 _d131757 |
||