000 00458nam a22001817a 4500
020 _a0-07-100347-9
040 _cUDSM
050 _aTK7874.V566
100 1 _aSZE, S. M
_eAuthor
245 1 _aVLSI Technology
250 _a2nd ed.-
260 _aNew York:
_bMcGraw-Hill Book Company,
_c1988
300 _a676p.:
_bill.;
_c23cm.
650 1 _aTechnology
650 1 _aVLSI process intergration
650 1 _aAnalytical techniques.
942 _2lcc
_cBK
_n0
999 _c138170
_d138170