| 000 | 00489nam a2200193Ia 4500 | ||
|---|---|---|---|
| 008 | 230524s9999 xx 000 0 und d | ||
| 040 | _cUDSM | ||
| 050 | _aTK7871.85.I576 1971 | ||
| 245 | 0 | _aInternational conferance Ion implantation in semiconducatiors | |
| 260 | _aBerlin | ||
| 260 | _bSpringer-Verlag | ||
| 260 | _c1971 | ||
| 300 | _a506p. | ||
| 300 | _c26cm. | ||
| 650 | _aIon Implantation | ||
| 700 | _aill. | ||
| 942 | _2Library of Congress Classification | ||
| 942 | _cBook | ||
| 999 |
_c18437 _d18437 |
||