| 000 | 00504nam a2200193Ia 4500 | ||
|---|---|---|---|
| 008 | 230524s9999 xx 000 0 und d | ||
| 040 | _cUDSM | ||
| 050 | _aTS695.B47 | ||
| 100 | _aBerry, Robert W.. | ||
| 245 | 0 |
_aThin film technology _cRobert W..Berry |
|
| 260 |
_c1968 _a: New York _bVan Nostrand |
||
| 300 |
_axxi,706p. _bill. _c24cm. |
||
| 650 | _aThin films | ||
| 650 | _a Circuits-Integrated | ||
| 700 | _aPeter M. Hall | ||
| 700 | _aMurray T. Harris | ||
| 942 |
_2lcc _cBK |
||
| 942 |
_cBK _2lcc |
||
| 999 |
_c50772 _d50772 |
||