000 00438nam a2200157Ia 4500
008 230524s9999 xx 000 0 und d
040 _cUDSM
050 _aQC166.R6
100 1 _aRoberts, Richard W.
_eAuthor
245 1 0 _aUtrahigh vacuum and its applications
260 _aEnglewood Cliffs:
_bPrentice-Hall, Inc,
_c1969.
300 _axix,199p.:
_bill.;
_c24cm.
650 1 _aVacuum technology
650 1 _aVacuum
942 _2lcc
_cBK
_n0
999 _c72862
_d72862