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Dry etching for microelectronics

Powell, Ronald A

Dry etching for microelectronics - New York : North- Holland Physics Publishing, 1984 - xi,299p. : ill. ; 24cm.

Includes bibliographical references and index

ISBN: 0 44486905 0

Subjects--Topical Terms:
Semiconductors-Etching,
Plasma etching

LC Class. No.: PHYSTK7871.85.D79

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