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Dry etching for microelectronics (Record no. 131757)

MARC details
000 -LEADER
fixed length control field	00530nam a2200181 4500
001 - CONTROL NUMBER
control field	000000320483
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number	0 44486905 0
040 ## - CATALOGING SOURCE
Transcribing agency	UDSM
050 ## - LIBRARY OF CONGRESS CALL NUMBER
Classification number	PHYSTK7871.85.D79
100 1# - MAIN ENTRY--PERSONAL NAME
Personal name	Powell, Ronald A
Relator term	Author
245 1# - TITLE STATEMENT
Title	Dry etching for microelectronics
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Place of publication, distribution, etc.	New York
Name of publisher, distributor, etc.	: North- Holland Physics Publishing,
Date of publication, distribution, etc.	1984
300 ## - PHYSICAL DESCRIPTION
Extent	xi,299p.
Other physical details	: ill.
Dimensions	; 24cm.
504 ## - BIBLIOGRAPHY, ETC. NOTE
Bibliography, etc. note	Includes bibliographical references and index
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element	Semiconductors-Etching,
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element	Plasma etching
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Source of classification or shelving scheme	Library of Congress Classification
Koha item type	Book
Suppress in OPAC	No

Holdings
Withdrawn status	Lost status	Source of classification or shelving scheme	Damaged status	Not for loan	Collection	Home library	Current library	Date acquired	Total checkouts	Full call number	Barcode	Date last seen	Price effective from	Koha item type	Loan category
		Library of Congress Classification			Physics Department	Directorate of Library Services (UDSM)	Directorate of Library Services (UDSM)	05/21/2024		PHYSTK7871.85.D79	000000320483	05/21/2024	05/21/2024	Book	No loan