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Dry etching for microelectronics

By: Material type: TextTextPublication details: New York : North- Holland Physics Publishing, 1984Description: xi,299p. : ill. ; 24cmISBN:
  • 0 44486905 0
Subject(s): LOC classification:
  • PHYSTK7871.85.D79
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Item type Current library Collection Call number Status Date due Barcode
Book Directorate of Library Services (UDSM) Physics Department PHYSTK7871.85.D79 (Browse shelf(Opens below)) Available 000000320483

Includes bibliographical references and index

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